Insights
Four Point Probe Sheet Resistance Measuring Machine
Semi-automatic Four Point Probe Sheet Resistance Measuring Machine
- Precision probe heads with a wide range of probe-tip radii;
Individually adjustable probe force;
High breakdown voltage;
Low leakage;
Multiple probe-tip spacings and configurations;
Tungsten-carbide or osmium-alloy probe tips;
Maintenance and configuration services.
Automatic Four Point Probe Sheet Resistance Measuring Machine
- Precision probe tips with a wide range of tip radius, independent probe pressure adjustment, high breakdown voltage, low leakage, various tip pitch and configurations, with the tip material of tungsten carbide.
- Probe pressure sensor that monitors probe pressure in real time effectively, preventing the measured samples from cracking due to the excessive pressure.
- The software can plot contour maps by using the sample dimension, including the positions of measured points, resistance values, 2D map, 3D map.
- Resistance range: 1m Ω/sq—5MΩ/sq.
- Dual-current mode to offset measurement errors which is possibly caused by the probe tip drift,;
- Edge effect correction.
- Suitable for measuring sheet resistance, resistivity, conductivity, and film thickness, for 12-inch wafers, as well as semiconductor materials, alloys, and conductive films etc